Castle checkmate, ofc the rarest
It's actually not that rare. Some famous players have done it Morphy has done it, Lasker had the chance, and even Eric Rosen did it recently. And that's not counting how often it happens in causal play between amateurs. It's even been done in tournaments. Some of the other checkmates listed here do not have that kind of frequency.
Just because you've seen it happen in some selected games doesn't mean it's not rare or it's not the rarest, highlighting matches doesn't mean anything, you'd have to provide actual statistics and numbers for anyone to demonstrate exactly what is the rarest checkmate. Chess.com maybe be able to tell us what is the rarest checkmate at least online.
Castling